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1. Identificação
Tipo de ReferênciaArtigo em Evento (Conference Proceedings)
Sitemtc-m21b.sid.inpe.br
Código do Detentorisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identificador8JMKD3MGP3W34P/3JDEM78
Repositóriosid.inpe.br/mtc-m21b/2015/04.29.19.04
Repositório de Metadadossid.inpe.br/mtc-m21b/2015/04.29.19.04.13
Última Atualização dos Metadados2018:06.04.02.55.23 (UTC) administrator
Chave SecundáriaINPE--PRE/
Chave de CitaçãoRamirezRamosCoraTrav:2015:ChPuPE
TítuloCharacterization of a Pulsed-DC PECVD System with Active Screen for DLC Films Growth
Ano2015
Data de Acesso09 maio 2024
Tipo SecundárioPRE CI
2. Contextualização
Autor1 Ramirez Ramos, Marco Antonio
2 Corat, Evaldo José
3 Trava-Airoldi, Vladimir Jesus
Identificador de Curriculo1
2 8JMKD3MGP5W/3C9JH33
Grupo1 LAS-CTE-INPE-MCTI-GOV-BR
2 LAS-CTE-INPE-MCTI-GOV-BR
3 LAS-CTE-INPE-MCTI-GOV-BR
Afiliação1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
Endereço de e-Mail do Autor1 marco.ramirez@las.inpe.br
2 corat@las.inpe.br
3 vladimir@las.inpe.br
Nome do EventoThe International Conference on Metallurgical Coatings and Thin Films, 42 (ICMCTF).
Localização do EventoSan Diego, California
Data20-24 apr.
Histórico (UTC)2015-04-29 19:04:13 :: simone -> administrator ::
2018-06-04 02:55:23 :: administrator -> simone :: 2015
3. Conteúdo e estrutura
É a matriz ou uma cópia?é a matriz
Estágio do Conteúdoconcluido
Transferível1
Tipo do ConteúdoExternal Contribution
ResumoActive Screen technique, as an additional cathode, is an advanced technology used for metal surface plasma nitrating with apparent advantages over conventional one. Side effects such as arcing or other way of plasma instability could be considerably reduced with the use of the active screen technique and thus dealing to an improved surface quality. Because of the absence of information concerning the active screen technique used for DLC growth, specially on different kinds of steels a new and deeper studies about the process will be considered.[1] Active screen coupled to PECVD system allows obtaining DLC films with lower pressure, lower temperature and low power energy consumption, achieving an inferior production costs with higher adhesion and better quality films in terms of hardness, density and finishing [2]. Also, the homogeneity of the coating in large area is improved [3]. In this work cylindrical actives screens are home manufactured with the same diameter and different mesh sizes. The temperature variation on ss 420 substrate as a function of the time in argon plasma discharge, gas pressure inside of the chamber and screen mesh sizes were carefully measured. Keeping constant the bias and gas flow, a very interesting results show that the temperature rise faster for higher screen mesh even at very low argon pressure in the plasma discharge and the threshold mesh size and lower pressure value was found. Also a strong dependence of the final temperature with the gas pressure reveal the possibilities of obtaining a better conditions for DLC growth than in the conventional PECVD system. In order to show a great performance of this new system a very good DLC films were obtained with good mechanical, trybological and chemical properties. References [1] C.X. Li, J. Georges, X.Y. Li, Surf. Eng. 18 (2002) 453458. [2] C.X. Li, T. Bell, H. Dong, Surf. Eng. 18 (2002) 174181. [3] S. Corujeira Gallo, H. Dong, Vacuum 84 (2009) 321325.
ÁreaFISMAT
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4. Condições de acesso e uso
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5. Fontes relacionadas
Repositório Espelhourlib.net/www/2011/03.29.20.55
Unidades Imediatamente Superiores8JMKD3MGPCW/3ESR3H2
Lista de Itens Citando
Acervo Hospedeirosid.inpe.br/mtc-m21b/2013/09.26.14.25.20
6. Notas
Campos Vaziosarchivingpolicy archivist booktitle callnumber copyholder copyright creatorhistory descriptionlevel dissemination doi e-mailaddress edition editor format isbn issn keywords label lineage mark nextedition notes numberoffiles numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle size sponsor subject targetfile tertiarymark tertiarytype type url versiontype volume
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